The Effect of Sensor Structure and Coplanar Electrode for Capacitive Based Flow Sensor

Mohd Norzaidi Mat Nawi

QR Code Link :
Type :	article
Subject :	Q Science
Main Author :	Mohd Norzaidi Mat Nawi
Additional Authors :	Nur Shahira Shahripul Azeman Muhammad Rashidi Ab Razak
Title :	The Effect of Sensor Structure and Coplanar Electrode for Capacitive Based Flow Sensor

Place of Production :	Tanjong Malim
Publisher :	Fakulti Sains dan Matematik
Year of Publication :	2019
Corporate Name :	Universiti Pendidikan Sultan Idris

Abstract : Universiti Pendidikan Sultan Idris

This paper presents the analysis of the capacitive based flow sensor using computational fluid dynamic (CFD) and mathematical equation approach. The CFD simulations for different types of sensor structure were carried out. Pressure and velocity of the fluid were varied in order to study the hydrodynamic parameter such as displacement and drag force. For the coplanar electrode, width of electrode and half gap between electrodes were varied for capacitive response using mathematical approach. Based on the simulation, the displacement of the dome increases as the pressure increases. The result shows that the most suitable thickness of the dome is 0.1 mm based on the displacement and the strain. Meanwhile for the coplanar electrode, the width and half gap showed a significant effect on the capacitance response.

References

1. Ferri, G., Munafò, A., Tesei, A., Braca, P., Meyer, F., Pelekanakis, K., Petroccia, R., Alves, J., Strode, C. and LePage, K., 2017. Cooperative robotic networks for underwater surveillance: an overview. IET Radar, Sonar & Navigation, 11(12), pp.1740-1761.

2. Hasan, N., Sefat, M.S. and Shahjahan, M., 2017, February. A low cost remotely operated vehicle for underwater surveillance—A complete experimental platform. In 2017 IEEE International Conference on Electrical, Computer and Communication Engineering (ECCE) (pp. 486-490).

3. Munasinghe, K., Aseeri, M., Almorqi, S., Hossain, M., Binte Wali, M. and Jamalipour, A., 2017. EM-based high speed wireless sensor networks for underwater surveillance and target tracking. Journal of Sensors, 2017.

4. Asadnia M., Kottapalli A.G.P., Karavitaki K.D., Warkiani M.E., Miao J., Corey D.P. & Triantafyllou M.(2016). From Biological Cilia to Artificial Flow Sensors: Biomimetic Soft Polymer Nanosensors with High Sensing Performance. Scientific Reports.

5. Qualtieri, A., Rizzi, F., Todaro, M.T., Passaseo, A., Cingolani, R., andDe Vittorio, M. (2011). Stress-driven AlN cantilever-based flow sensor for fish lateral line system. Microelectronic Engineering. 88(8): 2376-2378.

6. Sadeghi, M.M., Peterson, R.L., and Najafi, K. (2013). A 2-D directional air flow sensor array made using stereolithography and MEMS micro-hydraulic structures. The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). 722-725.

7. Nawi, M.N.M., Manaf, A.A., Arshad, M.R. and Sidek, O., 2012. Modeling of biomimetic flow sensor based on artificial hair cell using CFD and FEM Approach. In Proceeding Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2012) (pp. 161-164).

8. A.J. Hudspeth, Y. Choe, A.D. Mehta, P. Martin, “Putting ion channels to work: Mechanoelectrical transduction, adaptation, and amplification by hair cells”, Proceedings of the National Academy of Sciences of the United States of America, 97, pp. 11765- 11772, 2000.

9. Robert Fortuine, 2000. THE WORDS OF MEDICINE: Sources, Meanings, and Delights. 0398083134, 9780398083137.The Imagery of Medicine: Home and Earth m/s 139. Charles C Thomas Publisher, LTD. 2600, South First Street, Springfield. Illinois 62704, USA.

10. Hosain, M.L. and Fdhila, R.B., 2015. Literature review of accelerated CFD simulation methods towards online application. Energy Procedia, 75, pp.3307-3314.

11. Lu, J., Yu, J., & Shi, H. ,2017. Feasibility Study of Computational Fluid Dynamics Simulation of Coronary Computed Tomography Angiography Based on Dual-Source Computed Tomography. Journal of Clinical Medicine Research, 9(1), 40–45.

12. Magirl, C. S., Gartner, J. W., Smart, G. M., & Webb, R. H., 2009. Water velocity and the nature of critical flow in large rapids on the Colorado River, Utah. Water Resources Research, 45(5).

13. Chen, J.Z., Darhuber, A.A., Troian, S.M. and Wagner, S., 2004. Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation. Lab on a Chip, 4(5), pp.473-480.

This material may be protected under Copyright Act which governs the making of photocopies or reproductions of copyrighted materials.
You may use the digitized material for private study, scholarship, or research.

Back to previous page