FEA simulation of fluidic based pressure sensor for differrent shaped membrane

Mohd Norzaidi Mat Nawi

QR Code Link :
Type :	article
Subject :	Q Science
Main Author :	Mohd Norzaidi Mat Nawi
Additional Authors :	Muhammad Rashidi Ab Razak Nur Shahira Shahripul Azeman Mohd Faudzi Umar
Title :	FEA simulation of fluidic based pressure sensor for differrent shaped membrane

Place of Production :	Tanjong Malim
Publisher :	Fakulti Sains dan Matematik
Year of Publication :	2019
Corporate Name :	Universiti Pendidikan Sultan Idris

Abstract : Universiti Pendidikan Sultan Idris

In designing the fluidic based pressure sensor, the shape of the membrane is important in order to obtain maximum performance. The material used and the liquid inside the sensor is also important and deserve proper consideration. . In this work, the analysis of the membrane, materials and liquid using finite element analysis (FEA) are presented. The FEA simulation of the different shapes including square and rectangular shapes were carried out. The applied pressure and the dimension of selected membrane were varied in order to study the membrane performance.The result shows that the square shape produced the highest displacement of 4.7 mm compared to the other shapes. In terms of dimension, maximum performance can be achieved with a large area of membrane facing the applied pressure. The different types of membrane material andliquids that were used were also discussed. Two commonly used materials, Polyimide (PI) andPolydimethylsiloxane (PDMS) were chosen for this analysis. As for the liquids, methanol and propolyne carbonate were used.

References

1. Yunus, N. A. M., Halin, I. A., Sulaiman, N., Ismail, N. F., & Sheng, O. K. (2015). Valuation on MEMS Pressure Sensors and Device Applications. International Journal of Electrical, Computer, Energetic, Electronic and Communication Engineering, 9(8).

2. Almassri, A. M., Wan Hasan, W. Z., Ahmad, S. A., Ishak, A. J., Ghazali, A. M., Talib, D. N., & Wada, C. (2015). Pressure sensor: state of the art, design, and application for robotic hand. Journal of Sensors, 2015.

3. Xu, F., Li, X., Shi, Y., Li, L., Wang, W., He, L., & Liu, R. (2018). Recent developments for flexible pressure sensors: A review. Micromachines, 9(11), 580.

4. Eswaran, P., & Malarvizhi, S. (2012, March). Sensitivity analysis on mems capacitive differential pressure sensor with bossed diaphragm membrane. In 2012 International Conference on Devices, Circuits and Systems (ICDCS) (pp. 704-707). IEEE.

5. Bakhoum, E. G., & Cheng, M. H. (2009). Capacitive pressure sensor with very large dynamic range. IEEE Transactions on Components and Packaging Technologies, 33(1), 79-83..

6. Erguri, A. S., Huang, Y., Zhuang, X., Oralkan, O., Yarahoglu, G. G., & Khuri-Yakub, B. T. (2005). Capacitive micromachined ultrasonic transducers: Fabrication technology. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 52(12), 2242-2258.

7. Nawi, M. N. M., Manaf, A. A., Rahman, M. F. A., Arshad, M. R., & Sidek, O. (2014). One-side-electrode-type fluidic-based capacitive pressure sensor. IEEE Sensors Journal, 15(3), 1738-1746.

8. Nguyen, N. T., Hejazian, M., Ooi, C., & Kashaninejad, N. (2017). Recent advances and future perspectives on microfluidic liquid handling. Micromachines, 8(6), 186.

9. Rahman, M. F. A., Arshad, M. R., Manaf, A. A., & Yaacob, M. I. H. (2011, September). Modelling of a novel design of microfluidic based acoustic sensor. In 2011 IEEE Regional Symposium on Micro and Nano Electronics (pp. 56-59). IEEE.

10. Elbuken, C., Glawdel, T., Chan, D., & Ren, C. L. (2011). Detection of microdroplet size and speed using capacitive sensors. Sensors and Actuators A: Physical, 171(2), 55-62.

11. Zulfiqar, A., Pfreundt, A., Svendsen, W. E., & Dimaki, M. (2015). Fabrication of polyimide based microfluidic channels for biosensor devices. Journal of Micromechanics and Microengineering, 25(3), 035022.

12. Tsao, C. W. (2016). Polymer microfluidics: Simple, low-cost fabrication process bridging academic lab research to commercialized production. Micromachines, 7(12), 225.

13. Park, J. Y., Yoo, S. J., Lee, E. J., Lee, D. H., Kim, J. Y., & Lee, S. H. (2010). Increased poly (dimethylsiloxane) stiffness improves viability and morphology of mouse fibroblast cells. BioChip Journal, 4(3), 230-236.

14. Manaf, A. B. A., Nakamura, K., & Matsumoto, Y. (2008). Characterization of miniaturized one-side-electrode-type fluid-based inclinometer. Sensors and Actuators A: Physical, 144(1), 74-82.

15. Mark J.E., Ed., Polymer Data Handbook, vol. 2. New York, NY, USA: Oxford Univ. Press, 2009.

This material may be protected under Copyright Act which governs the making of photocopies or reproductions of copyrighted materials.
You may use the digitized material for private study, scholarship, or research.

Back to previous page