|
UPSI Digital Repository (UDRep)
|
|
| ||||||||||||||||||||||||||
| Abstract : Universiti Pendidikan Sultan Idris |
| This study demonstrates the wafer bonding method for performance tuning of piezoelectric Micromachined Ultrasonic Transducer (pMUT) from on-the-shelf piezoelectric disc (PZT). Polydimethylsiloxane (PDMS) and Epoxy were studied as adhesive materials. A thick bonding layer was deposited using the spin coating technique. Wafer bonding was carried out at room temperature to simulate in-situ pMUT repairing scenario. Bonding integrity is analyzed using Field Emission Scanning Electron Microscope (FESEM) images, while electrical characterization of pMUT is carried out using impedance analysis. Fabricated pMUTs have been calibrated using the pulse-echo technique in a freshwater tank. This study found that PDMS at the minimum thickness of 28 ?m is preferably compatible for in-situ wafer bonding of pMUT compared to the Epoxy. PDMS has significantly reduced device impedance at 62.4 % reduction compared to 58.9 % reduction for Epoxy. Both pMUTs were able to transmit and receive short acoustic ping with the calibrated speed of sound of 1333.3 m/s. PDMS has successfully contributed to a broader operating frequency between 30 - 150 kHz for transmission and 75 - 140 kHz for the reception. ? 2021 National Institute of Science Communication and Information Resources (NISCAIR). All rights reserved. |
| References |
Dangi, A., Hulge, A., Somasundaran, A., Valsalam, R. S., & Pratap, R. (2015). Complete development of a single cell PMUT transducer: Design, fabrication, characterization, and integration. J.Inst.Smart Struct.Syst., 4(41), 61-69. Retrieved from www.scopus.com Herrera, B., Pop, F., Cassella, C., & Rinaldi, M. (2020). Miniaturized PMUT-based receiver for underwater acoustic networking. Journal of Microelectromechanical Systems, 29(5), 832-838. doi:10.1109/JMEMS.2020.3018070 Jeong, Y., Genoe, J., Gijsenbergh, P., Segers, J., Heremans, P. L., & Cheyns, D. (2021). Fully flexible PMUT based on polymer materials and stress compensation by adaptive frequency driving. Journal of Microelectromechanical Systems, 30(1), 137-143. doi:10.1109/JMEMS.2020.3043052 Kamzin, A. S., Wei, F., Yang, Z., & Kamzin, S. A. (2005). Effect of thickness on the properties of FeAlN films. Technical Physics Letters, 31(6), 461-463. doi:10.1134/1.1969763 Li, H., Deng, Z. D., Yuan, Y., & Carlson, T. J. (2012). Design parameters of a miniaturized piezoelectric underwater acoustic transmitter. Sensors (Switzerland), 12(7), 9098-9109. doi:10.3390/s120709098 Qiu, Y., Gigliotti, J. V., Wallace, M., Griggio, F., Demore, C. E. M., Cochran, S., & Trolier-McKinstry, S. (2015). Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging. Sensors (Switzerland), 15(4), 8020-8041. doi:10.3390/s150408020 Wang, T., Sawada, R., & Lee, C. (2015). A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion. IEEE Electron Device Letters, 36(9), 957-959. doi:10.1109/LED.2015.2459075 Yaacob, M. I. H., Arshad, M. R., & Manaf, A. A. (2011). Modeling of circular piezoelectric micro ultrasonic transducer using CuAl10Ni5Fe4 on ZnO film for sonar applications. Acoustical Physics, 57(2), 151-158. doi:10.1134/S1063771011010180 |
| This material may be protected under Copyright Act which governs the making of photocopies or reproductions of copyrighted materials. You may use the digitized material for private study, scholarship, or research. |