A. Dangi, A. Hulge, A. Somasundaran, R. S. Valsalam, R. Pratap. (2015). Complete development of a single-cell PMUT transducer: design, fabrication, characterization, and integration. Journal of Institute of Smart Structure and Systems, JISSS, 4(1), 61–69.
Ahmad, K. A., Rahman, M. F., Zain, K. A., Haron, M. N., & Manaf, A. A. (2021). A fluidics-based Double Flexural Membrane Piezoelectric micromachined Ultrasonic transducer (pMUT) for wide-bandwidth underwater acoustic applications. Sensors, 21(16), 5582.
Akasheh, F., Fraser, J.D., Bose, S. and Bandyopadhyay, A. (2004). Development of a piezoelectric micromachined ultrasonic transducer. Sensor and Actuators A: Physical, 111, 275-287.
Akasheh, F., Fraser, J. D., Bose, S. and Bandyopadhyay, A. (2005). Piezoelectric micromachined ultrasonic transducer: Modelling the influence of structural parameters on device performance. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 52 (3), 455-468.
Akhbari, S., Sammoura, F., & Lin, L. (2016). Equivalent Circuit Models for Large Arrays of Curved and Flat Piezoelectric Micromachined Ultrasonic Transducers. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 63(3), 432–447.
Akasheh, F., Myers, T., Fraser, J. D., Bose, S., & Bandyopadhyay, A. (2004). Development of piezoelectric micromachined ultrasonic transducers. Sensors and Actuators, A: Physical, 111(2–3), 275–287.
Duval, F.F.C., Dorey, R.A., Wright, R.W., Huang, Z. And Whatmore, R.W. (2004). Fabrication and modeling of high-frequency PZT composite thin film membrane resonators. IEEE Transaction on Ultrasonics, Ferroelectrics and Frequency Control, 51 (10), 1255-1261.
Friend, J., Jamieson, E., Pennell, M., & Huebner, W. (2001). Ultrasonic characterization of poling in lead zirconate titanate ceramics. Appl. Phys. Letts, 79, 2794–2796.
Ganji, B.A., Majlis, B.Y. and Rastegar, S. (2008). First resonance frequency and high sensitivity for MEMS Acoustic Sensors. IEEE Proceedings on ICSE, 239-244.
Hernán Lara, R. D. (2013). Design of low-cost open-source spin coater and dip coater devices for deposition of thin films.
Haarindraprasad, R., Hashim, U., Gopinath, S. C., Kashif, M., Veeradasan, P., Balakrishnan, S. R., Foo, K. L., & Poopalan, P. (2015). Low temperature annealed zinc oxide nanostructured thin film-based transducers. Characterization for Sensing Applications. PLOS ONE, 10(7).
Hong-wei, W. (2016). Performance simulation and fabrication of PZT piezoelectric composite ring. International Journal of Materials Science and Applications, 5(2), 89.
Ho Soonmin. (2022). Characterization of cobalt selenide films using FESEM and EDX. International Journal of Thin Film Science and Technology, 11(1), 1–9.
Ito, M., Okada, N., Takabe, M., Otonari, M., Akai, D., Sawada, K. and Ishida, M. (2008). High Sensitivity ultrasonic sensor for hydrophone applications, using an epitaxial Pb(Zr, Ti)O3 film grown on SrRuO3/Pt/.-Al2O3/Si. Sensor and Actuators A: Physical,145-146: 278-282.
Jang, L. S., & Kuo, K. C. (2007). Fabrication and characterization of PZT thick films for sensing and actuation. Sensors, 7(4), 493–507.
Khan, S., Taube, W., Yogeswaran, N., Heidari, H., & Dahiya, R. (2015). Spice model of a piezo-electric transducer for pulse-echo system. 2015 11th Conference on Ph.D. Research in Microelectronics and Electronics, PRIME 2015, 334–337.
Ko, S. C., Kim, Y. C., Lee, S. S., Choi, S. H., & Kim, S. R. (2002). Piezoelectric membrane acoustic devices. IEEE Proceeding on 15th International Conference on Micro Elecro Mechanical Systems, 296-299.
Ko, S. C., Kim, Y. C., Lee, S. S., Choi, S. H., & Kim, S. R. (2003). Micromachined piezoelectric membrane acoustic device. Sensors and Actuators, A: Physical, 103(1–2), 130-134.
Lam, T.Y., Lam, K.H. and Chan, H.L.W. (2005). Micromachined piezoelectric polymer membrane acoustic sensor. Integrated Ferroelectrics, 76, 31-37.
Liu, J. C., Cheng, Y. T., Ho, S. Y., Hung, H. Sen, & Chang, S. H. (2017). Fabrication and characterization of high-sensitivity underwater acoustic multimedia communication devices with thick composite PZT films. Journal of Sensors, 7.
Li, H., Deng, Z. D., Yuan, Y., & Carlson, T. J. (2012). Design parameters of a miniaturized piezoelectric underwater acoustic transmitter. Sensors (Switzerland), 12(7), 9098–9109.
Li, J., Ren, W., Fan, G., & Wang, C. (2017). Design and fabrication of piezoelectric micromachined ultrasound transducer (pMUT) with partially-etched ZnO film. Sensors (Switzerland), 17(6).
Li, H., Deng, Z. D., & Carlson, T. (2012). Piezoelectric materials used in underwater acoustic transducers. Sensor Letters, 10(3), 679–697.
Le Clézio, E., Delaunay, T., Lam, M., & Feuillard, G. (2008). Piezoelectric material characterization by acoustic methods. Archives of Acoustics, 33(4), 603–608.
Lee, J., Ko, S.C., Song, H.W., Park, K.H. and Kim, J. (2008). Surface Micromachined Deep Back Chamber MEMS acoustic Sensor Using Two Sacrificial Layers. IEEE Proceedings on Sensors, 569-572.
Motamedi, M. E. (1994). Tu4D-6, 6, 521–524.
Myoung, J.-M., Yoon, W.-H., Lee, D.-H., Yun, I., Bae, S.-H., & Lee, S.-Y. (2002). Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition. Japanese Journal of Applied Physics, 41(Part 1, No. 1), 28–31.
Muralt, P., Ladermann, N., Baborowski, J., Barzegar, A., Gentil, S., Gelgacem, B., Petitgrand, S., Bosseboeuf, A. and Setter, N. (2005). Piezoelectric micromachined ultrasonic transducer based on PZT thin films. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 52 (12), 2276-2288.
Nithya, N., Radhakrishnan, R. (2012). Effect of thickness on the properties ZnO thin films. Advance in Applied Science Research, 3(6), 4041-4047.
Percin, G. and Khuri-Yakub, B.T (2002). Piezoelectrically actuated flex tensional micromachine ultrasound transducers, Ultrasonics, 40, 441-448.
Perc¸in, G., Atalar, A., Levent Degertekin, F., Khuri-Yakub, B.T. (1998). Micromachined two-dimensional array piezoelectrically actuated transducers. Appl. Phys. Lett., 72, 1397.
Perumal, V., Hashim, U., Gopinath, S. C. B., Haarindraprasad, R., Liu, W. W., Poopalan, P., Ruslinda, A. R. (2015). Thickness dependent nanostructural, morphological, optical and impedometric analyses of zinc oxide-Gold hybrids: Nanoparticle to thin film. PLoS ONE, 10(12), 1-24.
Qiu, Y., Gigliotti, J. V., Wallace, M., Griggio, F., Demore, C. E. M., Cochran, S., & Trolier-McKinstry, S. (2015). Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging. Sensors (Switzerland), 15(4), 8020-8041.
Raj, M. K. Chakraborty, S. (2020) PDMS microfluidics: A mini review. J. Appl. Polym. Sci., 137, 48958.
Ramesh, R. Ebenerzer, D.D (2008) Equivalent circuit for broadband underwater transducers. IEEE Transactions on Untrasonics, ferroelectrics and frequency control. 55 (9), 2079-2083.
Rashidi, F. (2015). A study of thickness distribution and crystal structure of sputter- deposited silicon thin films. Simon Fraser University.
Roberto, M. (n.d.). Modeling and characterization of piezoelectric micromachined Ultrasonic Transducers (pMUT), thesis.
Shevtsova, M., Nasedkin, A. V, Shevtsov, S. N., & Zhilyaev, I. (2016). An optimal design of underwater piezoelectric transducers of new generation. The 23th International Congress on Sound and Vibration.
Wang, Z., Zhu, W., Miao, J., Zhu, H., Chao, C., & Tan, O. K. (2006). Micromachined thick film piezoelectric ultrasonic transducer array. Sensors and Actuators, A: Physical, 130-131(SPEC. ISS.), 485-490.
Xiaoming, W., Ren, T. and Liu, L. (2006). Active damping of a piezoelectric MEMS acoustic Sensor. Integrated ferroelectrics, 80, 317-329.
Xiaoming, W., Yi, Y., YiPing, Z., NinXing, Z., TianLing, R. and Litian, L. (2007). MEMS piezoelectric acoustic transducer. Integrated Ferroelectrics, 89, 150-159.
Yaacob, M.I.H., Arshad, M.R. and Manaf, A.A. (2012). Enhancement of Piezoelectric Micromachined Ultrasonic Transducer Using Polymer Membrane for Underwater Aplicatons. Indian Journal of Geo Marine Sciences. 46(1), 533-539. ISI Impact Factr: 0.204
Yaacob, M.I.H., (2013). Piezoelectric Micro Ultrasonic Transducer (pMUT) For Underwater Sonar Applications. Universiti Sains Malaysia.
Yaacob, M. I., Arshad, M. R., Manaf, A. A., & Rahman, M. F. (2011). Vibration analysis of pMUT with polymer adhesion layer. IEEE Regional Symposium on Micro and Nano Electronics.
Yaacob, M. I., Arshad, M. R., & Abd Manaf, A. (2010). Modeling and theoretical characterization of Circular pMUT for Immersion Applications. OCEANS'10 IEEE SYDNEY.
Yaacob, M. I., Arshad, M. R., Manaf, A. A., & Rahman, M. F. (2012). 200 KHz pMUT using PZT on PDMS membrane for sonar applications. 2012 4th International Conference on Intelligent and Advanced Systems (ICIAS2012).
Yamashita, K., Chansomphou, L., Murakami, H. and Okuyama, M. (2004) Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning. Sensors and Actuators A; Physical, 114, 147-153.
Zhang, Y., Xu, L., Gu, J., and Hu, H (2008). The electrical performance analysis piezoelectric micromachine ultrasound transducer for the audio directional loudspeaker. International Conference on Computer and Electrical Engineering, 812-816.
PUBLICATIONS
Harun, J. W., Yaacob, M. I. (2021). Ultrasonic transducer tuning using wafer bonding method. Indian Journal of Geo-Marine Sciences, 50(11).
Harun, J. W., Yaacob, M. I. (2021). In-situ ultrasonic transducer tuning using wafer bonding method for underwater sonar applications. Department of Physics, Faculty of Science and Mathematics Sultan Idris Education University.
Harun, J. W., Yaacob, M. I., Nawi, M. N. (2019). pMUT structure enhancement using the wafer transfer approach. Department of Physics, Faculty of Science and Mathematics Sultan Idris Education University.
CONFERENCE
Harun, J. W., Jaafar, R., Yaacob, M. I. (2018). Piezoelectric Micromachined Ultrasonic Transducer (pMUT): A Short Review on Latest Advancement.
The 6th International Postgraduate Conference on Science and Mathematics 2018 (IPCSM 2018).