Simulation of piezoelectric micro ultrasoniv transducer for underwater aplications

This research aimed to analyze multiple underwater Piezoelectric Micro Ultrasonic Transducer (PMUT) models using several types of piezoelectric materials. The models were based on the basic structure of circular and square PMUT. Each structure was designed with and without a supporting layer of silicon dioxide. Due to limited literature and structured database of PMUT, the researchers use more time and cost through a try-and-error approach. This study analyzes the receiving and transmitting sensitivity of the PMUT. Circular and square PMUT, with and without supporting layers were designed and simulated using six different piezoelectric materials namely aluminum nitride, lithium niobate, lead zirconate titanate type 5A (PZT-5A), lead zirconate titanate type 5H (PZT-5H), quartz and zinc oxide. FEA simulation and modeling were carried out using the COMSOL Multiphysics 5.0 software. The models were analyzed based on structural and electro-acoustic parameters including thickness, radius, length, width, frequency and voltage. All parameters were varied and the PMUT performances were determined based on the acoustic pressure, sound pressure level, displacement of the piezoelectric material and mises stress. The findings show that PZT-5H has the best performance in receiving and transmitting sensitivities at 1954 dB acoustic pressure at 240 kHz and 12 V of the drive voltage. The total device thickness is 430 _m. In conclusion, a total of 24 PMUT models have been analyzed and the performance of each model has been determined. All findings were compiled in a structured database to assist and guide researchers in designing and developing PMUT for underwater applications.