FEA simulation of fluidic based pressure sensor for differrent shaped membrane

Mohd Norzaidi Mat Nawi

Abstract

In designing the fluidic based pressure sensor, the shape of the membrane is important in order to obtain maximum performance. The material used and the liquid inside the sensor is also important and deserve proper consideration. . In this work, the analysis of the membrane, materials and liquid using finite element analysis (FEA) are presented. The FEA simulation of the different shapes including square and rectangular shapes were carried out. The applied pressure and the dimension of selected membrane were varied in order to study the membrane performance.The result shows that the square shape produced the highest displacement of 4.7 mm compared to the other shapes. In terms of dimension, maximum performance can be achieved with a large area of membrane facing the applied pressure. The different types of membrane material andliquids that were used were also discussed. Two commonly used materials, Polyimide (PI) andPolydimethylsiloxane (PDMS) were chosen for this analysis. As for the liquids, methanol and propolyne carbonate were used.

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