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Type :thesis
Subject :Q Science (General)
Main Author :Nur Shahira Shahripul Azeman
Title :Robust microfluidic flow sensor with a biologically inspired cupula structure for flow rate measurement
Place of Production :Tanjong Malim
Publisher :Fakulti Sains dan Matematik
Year of Publication :2022
Corporate Name :Universiti Pendidikan Sultan Idris
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Abstract : Universiti Pendidikan Sultan Idris
This research is about the development of robust microfluidic flow sensor with a biologically-inspired cupula structure for flow rate measurement. The proposed flow sensor consists of a dome-shaped structure, microchannel and coplanar electrode. Mechanical analysis of the dome-shaped membrane is carried out by using finite element analysis in terms of deflection and Misses Stress. The simulations using Ansys software were carried out for both Computational Fluid Dynamic (CFD) and Finite Element Analysis (FEA). A sensor with a 3.2 mm radius of dome and 0.5 mm in dome thickness had been selected from the simulation due to its flexibility. The mold of the flow sensor was designed by using Solidwork 2016 and fabricated using soft lithography process including casting and molding process in Polydimethysiloxane (PDMS) structure fabrication. The electrode was fabricated by using Printed Circuit Board (PCB) process. It was design by using EAGLE software. There were a few processes that involved in PCB process which were printing process, exposure process, developer process and etching process. Last process is a sealing process, where both fabricated PDMS structure and electrode were seal and carefully aligned. Polydimethylsiloxane (PDMS) is used as a membrane due to its high elasticity compared to other polymers. Propylene carbonate (PC) electrolyte is used for its high dielectric constant that gives good performance in terms of its high boiling point which improves the longevity of the liquid inside the microchannel. Based on the experimental results, the operating frequency and the flow rate of the flow sensor were ideally observed at 4.4 kHz and between 0 to 0.17 UM/s The effects of temperature and pressure were recorded and discussed in this research.

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