UPSI Digital Repository (UDRep)
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Abstract : Universiti Pendidikan Sultan Idris |
This research is about the development of robust microfluidic flow sensor with a
biologically-inspired cupula structure for flow rate measurement. The proposed flow
sensor consists of a dome-shaped structure, microchannel and coplanar electrode.
Mechanical analysis of the dome-shaped membrane is carried out by using finite
element analysis in terms of deflection and Misses Stress. The simulations using
Ansys software were carried out for both Computational Fluid Dynamic (CFD) and
Finite Element Analysis (FEA). A sensor with a 3.2 mm radius of dome and 0.5 mm
in dome thickness had been selected from the simulation due to its flexibility. The
mold of the flow sensor was designed by using Solidwork 2016 and fabricated using
soft lithography process including casting and molding process in
Polydimethysiloxane (PDMS) structure fabrication. The electrode was fabricated by
using Printed Circuit Board (PCB) process. It was design by using EAGLE software.
There were a few processes that involved in PCB process which were printing
process, exposure process, developer process and etching process. Last process is a
sealing process, where both fabricated PDMS structure and electrode were seal and
carefully aligned. Polydimethylsiloxane (PDMS) is used as a membrane due to its
high elasticity compared to other polymers. Propylene carbonate (PC) electrolyte is
used for its high dielectric constant that gives good performance in terms of its high
boiling point which improves the longevity of the liquid inside the microchannel.
Based on the experimental results, the operating frequency and the flow rate of the
flow sensor were ideally observed at 4.4 kHz and between 0 to 0.17 UM/s The
effects of temperature and pressure were recorded and discussed in this research. |
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