This research is about the development of robust microfluidic flow sensor with a biologically-inspired cupula structure for flow rate measurement. The proposed flow sensor consists of a dome-shaped structure, microchannel and coplanar electrode. Mechanical analysis of the dome-shaped membrane is carried out by using finite element analysis in terms of deflection and Misses Stress. The simulations using Ansys software were carried out for both Computational Fluid Dynamic (CFD) and Finite Element Analysis (FEA). A sensor with a 3.2 mm radius of dome and 0.5 mm in dome thickness had been selected from the simulation due to its flexibility. The mold of the flow sensor was designed by using Solidwork 2016 and fabricated using soft lithography process including casting and molding process in Polydimethysiloxane (PDMS) structure fabrication. The electrode was fabricated by using Printed Circuit Board (PCB) process. It was design by using EAGLE software. There were a few processes .....

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